Gases In Electronics Industry
Special gas is an indispensable silicon-based support source material in the fields of optoelectronics, microelectronics, etc., especially in the manufacturing process of ultra-large-scale integrated circuits, liquid crystal display devices, amorphous silicon thin film solar cells, semiconductor light-emitting devices and semiconductor materials. Its purity and cleanliness directly affect the quality, integration, specific technical indicators and yield of optoelectronics and microelectronics components, and fundamentally restrict the accuracy and accuracy of circuits and devices.
The semiconductor industry uses a wide variety of gases, high quality requirements, and a small amount of gas, most of which are toxic or corrosive gases. There are more than one hundred varieties. The application classification of specialty gases in the semiconductor industry mainly includes:
1. Silicon group gas: silicon-containing silanes, such as silane, dichlorodihydrosilane, disilane, etc.
2. Doping gases: gases containing three and five atoms of boron, phosphorus, arsenic, such as boron trichloride, boron trifluoride, phosphorane, arsine, etc.
3. Etching cleaning gas: mainly containing halide and halocarbon compounds, such as chlorine, nitrogen trifluoride, hydrogen bromide, carbon tetrafluoride, hexafluoroethane, etc.
4. Reactive gas: mainly carbon and nitrogen oxides, such as carbon dioxide, ammonia, nitrous oxide, etc.
5. Metal vapor deposition gas: containing metal halide and organic alkanes, such as tungsten hexafluoride, trimethylgallium, etc.